US PATENT SUBCLASS 438 / 547
.~.~.~ Simultaneously

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

510  DF  INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7}
542  DF  .~ Diffusing a dopant {15}
546  DF  .~.~ Plural dopants in same region (e.g., through same mask opening, etc.) {1}
547.~.~.~ Simultaneously

DEFINITION

Classification: 438/547

Simultaneously:

(under subclass 546) Processes wherein the multiple electrically active impurities are applied at the same time.