US PATENT SUBCLASS 438 / 545
.~.~ Forming partially overlapping regions
Current as of:
June, 1999
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438 /
HD
SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
510
DF
INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL
{7}
542
DF
.~ Diffusing a dopant {15}
545
.~.~ Forming partially overlapping regions
DEFINITION
Classification: 438/545
Forming partially overlapping regions:
(under subclass 542) Processes for permeating one or more electrically active impurities in localized areas which lap over each other only in part.