US PATENT SUBCLASS 438 / 532
.~.~ Into polycrystalline region

Current as of: June, 1999
Click HD for Main Headings
Click for All Classes

Internet Version by PATENTEC © 1999      Terms of Use


438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

510  DF  INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7}
514  DF  .~ Ion implantation of dopant into semiconductor region {12}
532.~.~ Into polycrystalline region

DEFINITION

Classification: 438/532

Into polycrystalline region:

(under subclass 514) Process involving implanting electrically active dopant ions into polycrystalline semiconductive regions.