US PATENT SUBCLASS 438 / 530
.~.~ Including heat treatment

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

510  DF  INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7}
514  DF  .~ Ion implantation of dopant into semiconductor region {12}
530.~.~ Including heat treatment

DEFINITION

Classification: 438/530

Including heat treatment:

(under subclass 514) Process including a step of heat treating the semiconductive substrate.

SEE OR SEARCH THIS CLASS, SUBCLASS:

795, for a process of heat treatment of a semiconductive substrate to modify the properties thereof.