US PATENT SUBCLASS 438 / 516
.~.~ Including charge neutralization

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

510  DF  INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7}
514  DF  .~ Ion implantation of dopant into semiconductor region {12}
516.~.~ Including charge neutralization

DEFINITION

Classification: 438/516

Including charge neutralization:

(under subclass 514) Process including discharging electrical charges which would otherwise accumulate in the semiconductor substrate due to the implantation of electrically active

dopant ions therein.