438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
478 | DF | FORMATION OF SEMICONDUCTIVE ACTIVE REGION ON ANY SUBSTRATE (E.G., FLUID GROWTH, DEPOSITION) {9} |
500 | .~ Fluid growth from liquid combined with subsequent diverse operation {2} | |
501 | DF | .~.~> Doping of semiconductor |
502 | DF | .~.~> Heat treatment |