US PATENT SUBCLASS 438 / 492
.~ Fluid growth step with preceding and subsequent diverse operation


Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

478  DF  FORMATION OF SEMICONDUCTIVE ACTIVE REGION ON ANY SUBSTRATE (E.G., FLUID GROWTH, DEPOSITION) {9}
492.~ Fluid growth step with preceding and subsequent diverse operation


DEFINITION

Classification: 438/492

Fluid growth step with preceding and subsequent diverse operation:

(under subclass 478) Process having a step of the fluid growth of a semiconductor active region combined with a preceding nonfluid growth step and a subsequent nonfluid growth step.