US PATENT SUBCLASS 438 / 468
.~ Electromigration

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

466  DF  DIRECT APPLICATION OF ELECTRICAL CURRENT {4}
468.~ Electromigration

DEFINITION

Classification: 438/468

Electromigration:

(under subclass 466) Process involving the movement of atoms (usually dopant atoms) under the influence of an electric field.