US PATENT SUBCLASS 438 / 465
.~ Having a perfecting coating
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
460
DF
SEMICONDUCTOR SUBSTRATE DICING
{5}
465
.~ Having a perfecting coating
DEFINITION
Classification: 438/465
Having a perfecting coating:
(under subclass 460) Process including a step of coating the semiconductor substrate with a coating which enhances the dicing operation.