US PATENT SUBCLASS 438 / 457
.~ Warping of semiconductor substrate
Current as of:
June, 1999
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438 /
HD
SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
455
DF
BONDING OF PLURAL SEMICONDUCTOR SUBSTRATES
{4}
457
.~ Warping of semiconductor substrate
DEFINITION
Classification: 438/457
Warping of semiconductor substrate:
(under subclass 455) Process for joining plural semiconductive substrates into an integral body including a step of bending one or more of the semiconductor substrates to be joined.