US PATENT SUBCLASS 438 / 456
.~ Having enclosed cavity


Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

455  DF  BONDING OF PLURAL SEMICONDUCTOR SUBSTRATES {4}
456.~ Having enclosed cavity


DEFINITION

Classification: 438/456

Having enclosed cavity:

(under subclass 455) Process for joining plural semiconductive substrates into an integral body resulting in a partially or wholly enclosed void structure therein.

SEE OR SEARCH THIS CLASS, SUBCLASS:

422, for a process of forming an electrically isolated lateral semiconductive structure utilizing a partially or wholly enclosed cavity as an air-gap dielectric.