US PATENT SUBCLASS 438 / 402
.~ And gettering of substrate

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

400  DF  FORMATION OF ELECTRICALLY ISOLATED LATERAL SEMICONDUCTIVE STRUCTURE {10}
402.~ And gettering of substrate

DEFINITION

Classification: 438/402

And gettering of substrate:

(under subclass 400) Process for making laterally spaced electrically isolated semiconductor regions having a step of gettering a semiconductor substrate.