US PATENT SUBCLASS 438 / 395
.~.~.~ Multiple doping steps

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

381  DF  MAKING PASSIVE DEVICE (E.G., RESISTOR, CAPACITOR, ETC.) {4}
393  DF  .~ Planar capacitor {1}
394  DF  .~.~ Including doping of semiconductive region {1}
395.~.~.~ Multiple doping steps

DEFINITION

Classification: 438/395

Multiple doping steps:

(under subclass 394) Process for making a planar capacitor utilizing plural steps of incorporating electrically active dopant species into a semiconductive region of the substrate forming the first capacitor plate.