US PATENT SUBCLASS 438 / 394
.~.~ Including doping of semiconductive region

Current as of: June, 1999
Click HD for Main Headings
Click for All Classes

Internet Version by PATENTEC © 1999      Terms of Use


438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

381  DF  MAKING PASSIVE DEVICE (E.G., RESISTOR, CAPACITOR, ETC.) {4}
393  DF  .~ Planar capacitor {1}
394.~.~ Including doping of semiconductive region {1}
395  DF  .~.~.~> Multiple doping steps

DEFINITION

Classification: 438/394

Including doping of semiconductive region:

(under subclass 393) Process for making a planar capacitor having a step of introducing electrically active dopant species into a semiconductive region of the substrate forming the first capacitor plate.