US PATENT SUBCLASS 438 / 33
.~ Substrate dicing
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
22
DF
MAKING DEVICE OR CIRCUIT EMISSIVE OF NONELECTRICAL SIGNAL
{12}
33
.~ Substrate dicing
DEFINITION
Classification: 438/33
Substrate dicing:
(under subclass 22) Process having a step of dividing the semiconductor substrate into plural separate bodies.
(1) Note. The dicing may be done by any manner, such as abrading, sawing, etching, cleavage, or a combination thereof.
SEE OR SEARCH CLASS
83, Cutting, for generic processes of cutting a substrate
into discrete individual units.
225, Severing by Tearing or Breaking,
1+, for methods.
451, Abrading, for a process of dicing by abrading.