US PATENT SUBCLASS 438 / 310
.~ Gettering of semiconductor substrate
Current as of:
June, 1999
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438 /
HD
SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
309
DF
FORMING BIPOLAR TRANSISTOR BY FORMATION OR ALTERATION OF SEMICONDUCTIVE ACTIVE REGIONS
{25}
310
.~ Gettering of semiconductor substrate
DEFINITION
Classification: 438/310
Gettering of semiconductor substrate:
(under subclass 309) Process having a step of gettering the semiconductor substrate.
