US PATENT SUBCLASS 438 / 143
.~ Gettering of semiconductor substrate

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

142  DF  MAKING FIELD EFFECT DEVICE HAVING PAIR OF ACTIVE REGIONS SEPARATED BY GATE STRUCTURE BY FORMATION OR ALTERATION OF SEMICONDUCTIVE ACTIVE REGIONS {6}
143.~ Gettering of semiconductor substrate

DEFINITION

Classification: 438/143

Gettering of semiconductor substrate:

(under subclass 142) Process including a step of gettering the semiconductor substrate.

SEE OR SEARCH THIS CLASS, SUBCLASS:

471, for process of gettering a semiconductor substrate, per se.