430 / | HD | RADIATION IMAGERY CHEMISTRY: PROCESS, COMPOSITION, OR PRODUCT THEREOF |
269 | DF | IMAGING AFFECTING PHYSICAL PROPERTY OF RADIATION SENSITIVE MATERIAL, OR PRODUCING NONPLANAR OR PRINTING SURFACE - PROCESS, COMPOSITION, OR PRODUCT {17} |
322 | .~ Forming nonplanar surface {3} | |
323 | DF | .~.~> Including etching substrate |
324 | DF | .~.~> Including material deposition |
325 | DF | .~.~> Post image treatment to produce elevated pattern {1} |