US PATENT SUBCLASS 430 / 311
.~ Making electrical device

Current as of: June, 1999
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430 /   HD   RADIATION IMAGERY CHEMISTRY: PROCESS, COMPOSITION, OR PRODUCT THEREOF

269  DF  IMAGING AFFECTING PHYSICAL PROPERTY OF RADIATION SENSITIVE MATERIAL, OR PRODUCING NONPLANAR OR PRINTING SURFACE - PROCESS, COMPOSITION, OR PRODUCT {17}
311.~ Making electrical device {3}
312  DF  .~.~> Including multiple resist image formation
313  DF  .~.~> With formation of resist image, and etching of substrate or material deposition {5}
319  DF  .~.~> Named electrical device

DEFINITION

Classification: 430/311

Making electrical device:

(under subclass 269) Processes wherein the image is used as or to form an electrical device.

SEE OR SEARCH CLASS

438, Semiconductor Device Manufacturing: Process, appropriate

subclass for methods of making semiconductor devices; see search notes therein.