427 / | HD | COATING PROCESSES |
457 | DF | DIRECT APPLICATION OF ELECTRICAL, MAGNETIC, WAVE, OR PARTICULATE ENERGY {15} |
569 | DF | .~ Plasma (e.g., corona, glow discharge, cold plasma, etc.) {5} |
578 | .~.~ Silicon containing coating material {1} | |
579 | DF | .~.~.~> Silicon oxides or nitrides |