(under the class definition) Subject matter comprising means or steps for planning or devising a template used for etching circuit pattern on semiconductor wafers.
SEE OR SEARCH THIS CLASS, SUBCLASS:
257, Active Solid-State Devices (e.g., Transistors, Solid-State Diodes), appropriate subclasses for detail structure of active solid-state devices.
364, Electrical Computers and Data Processing Systems, subclass 468.28 for computer-controlled semiconductor fabrication.
430, Radiation Imagery Chemistry: Process, Composition, or Product Thereof, subclass 5 for radiation masks used in radiation imaging of semiconductor devices.
438, Semiconductor Device Manufacturing: Process, appropriate subclasses for the process of manufacturing semiconductor devices.
