(under subclass 500.2) Subject matter including means or steps for tracing or drawing an electronic pattern on a semiconductor wafer or mask with particle beam.
(1) Note. Examples of particle beams are ion beams, electron beams, or e-beams.
SEE OR SEARCH CLASS
204, Chemistry: Electrical and Wave Energy,
298.01, 298.39 for coating, forming, or etching apparatus using atomic particles.
250, Radiant Energy,
491.1, 492.3 for irradiating object or material and the ion or electron beam irradiation, per se.
