| 257 / | HD | ACTIVE SOLID-STATE DEVICES (E.G., TRANSISTORS, SOLID-STATE DIODES) |
| 414 | DF | RESPONSIVE TO NON-ELECTRICAL SIGNAL (E.G., CHEMICAL, STRESS, LIGHT, OR MAGNETIC FIELD SENSORS) {4} |
| 415 | DF | .~ Physical deformation {3} |
| 417 | DF | .~.~ Strain sensors {1} |
| 418 | | .~.~.~ With means to concentrate stress {1} |
| 419 | DF | .~.~.~.~> With thinned central active portion of semiconductor surrounded by thick insensitive portion (e.g., diaphragm type strain gauge) |