US PATENT SUBCLASS 250 / 492.2
.~ Irradiation of semiconductor devices

Current as of: June, 1999
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250 /   HD   RADIANT ENERGY

492.1  DF  IRRADIATION OF OBJECTS OR MATERIAL {2}
492.2.~ Irradiation of semiconductor devices {4}
492.21  DF  .~.~> Ion bombardment
492.22  DF  .~.~> Pattern control
492.23  DF  .~.~> Variable beam
492.24  DF  .~.~> Photocathode projection

DEFINITION

Classification: 250/492.2

Irradiation of semiconductor devices:

(under subclass 492.1) Subject matter wherein the object irradiated is made of, at least in part, a semiconductor material.