US PATENT SUBCLASS 250 / 492.23
.~.~ Variable beam

Current as of: June, 1999
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250 /   HD   RADIANT ENERGY

492.1  DF  IRRADIATION OF OBJECTS OR MATERIAL {2}
492.2  DF  .~ Irradiation of semiconductor devices {4}
492.23.~.~ Variable beam

DEFINITION

Classification: 250/492.23

Variable beam:

(under subclass 492.2) Subject matter including the use of a variable beam of charged particles which may be used to project a pattern onto an object.

(1) Note. The variable beam of this subclass type may be formed, for example, by at least two different operative means, one being projected onto another.

SEE OR SEARCH THIS CLASS, SUBCLASS:

492.22, for pattern control.