US PATENT SUBCLASS 216 / 38
PLANARIZING A NONPLANAR SURFACE
Current as of:
June, 1999
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ETCHING A SUBSTRATE: PROCESSES
38
PLANARIZING A NONPLANAR SURFACE
DEFINITION
Classification: 216/38
PLANARIZING A NONPLANAR SURFACE:
(under the class definition) Process directed to the smoothing or leveling of a surface.
(1) Note. The planarizing may include the use of a planarizing coating layer.
