US PATENT SUBCLASS 216 / 38
PLANARIZING A NONPLANAR SURFACE


Current as of: June, 1999
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216 /   HD   ETCHING A SUBSTRATE: PROCESSES

38PLANARIZING A NONPLANAR SURFACE


DEFINITION

Classification: 216/38

PLANARIZING A NONPLANAR SURFACE:

(under the class definition) Process directed to the smoothing or leveling of a surface.

(1) Note. The planarizing may include the use of a planarizing coating layer.