US PATENT SUBCLASS 216 / 37
ETCHING AND COATING OCCUR IN THE SAME PROCESSING CHAMBER

Current as of: June, 1999
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216 /   HD   ETCHING A SUBSTRATE: PROCESSES

37ETCHING AND COATING OCCUR IN THE SAME PROCESSING CHAMBER

DEFINITION

Classification: 216/37

ETCHING AND COATING OCCUR IN THE SAME PROCESSING CHAMBER:

(under the class definition) Process wherein etching and coating occur in the same vessel.

SEE OR SEARCH CLASS

427, Coating Processes, for etching used to perfect a coating operation.