US PATENT SUBCLASS 204 / 298.39
.~.~.~ Plural parallel plates (e.g., desmearing reactor, etc.)
Current as of:
June, 1999
Click
HD
for Main Headings
Click for
All Classes
Internet Version by
PATENTEC
© 1999
Terms of Use
204 /
HD
CHEMISTRY: ELECTRICAL AND WAVE ENERGY
193
DF
APPARATUS
{5}
298.01
DF
.~ Coating, forming or etching by sputtering {2}
298.31
DF
.~.~ Etching {8}
298.39
.~.~.~ Plural parallel plates (e.g., desmearing reactor, etc.)
DEFINITION
Classification: 204/298.39
Plural parallel plates (e.g., desmearing reactor, etc.):
(under subclass 298.31) Apparatus including a plurality of spaced apart, parallel electrode plates or workpiece holders (e.g., desmearing reactor, etc.).
