US PATENT SUBCLASS 204 / 298.38
.~.~.~ Microwave excitation

Current as of: June, 1999
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204 /   HD   CHEMISTRY: ELECTRICAL AND WAVE ENERGY

193  DF  APPARATUS {5}
298.01  DF  .~ Coating, forming or etching by sputtering {2}
298.31  DF  .~.~ Etching {8}
298.38.~.~.~ Microwave excitation

DEFINITION

Classification: 204/298.38

Microwave excitation:

(under subclass 298.31) Apparatus including means for generating plasma by excitation from a source of microwaves.