US PATENT SUBCLASS 204 / 298.37
.~.~.~ Magnetically enhanced
Current as of:
June, 1999
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204 /
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CHEMISTRY: ELECTRICAL AND WAVE ENERGY
193
DF
APPARATUS
{5}
298.01
DF
.~ Coating, forming or etching by sputtering {2}
298.31
DF
.~.~ Etching {8}
298.37
.~.~.~ Magnetically enhanced
DEFINITION
Classification: 204/298.37
Magnetically enhanced:
(under subclass 298.31) Apparatus including means for magnetic enhancement of workpiece sputtering, plasma shaping or confinement, or control of etching parameters.