US PATENT SUBCLASS 204 / 298.35
.~.~.~ Multi-chamber, load/unload means or moving workpiece

Current as of: June, 1999
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204 /   HD   CHEMISTRY: ELECTRICAL AND WAVE ENERGY

193  DF  APPARATUS {5}
298.01  DF  .~ Coating, forming or etching by sputtering {2}
298.31  DF  .~.~ Etching {8}
298.35.~.~.~ Multi-chamber, load/unload means or moving workpiece

DEFINITION

Classification: 204/298.35

Multi-chamber, load/unload means or moving workpiece:

(under subclass 298.31) Apparatus including a plurality of distinct chambers or subchambers, means for loading or unloading a workpiece, or means for moving a workpiece.