US PATENT SUBCLASS 204 / 298.09
.~.~.~ Specified cooling or heating

Current as of: June, 1999
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204 /   HD   CHEMISTRY: ELECTRICAL AND WAVE ENERGY

193  DF  APPARATUS {5}
298.01  DF  .~ Coating, forming or etching by sputtering {2}
298.02  DF  .~.~ Coating {13}
298.09.~.~.~ Specified cooling or heating

DEFINITION

Classification: 204/298.09

Specified cooling or heating:

(under subclass 298.02) Apparatus including significant specified means for cooling or heating of an electrode or work holder.

(1) Note. Apparatus in which cooling or heating means are merely nominally specified are not included herein.