204 / | HD | CHEMISTRY: ELECTRICAL AND WAVE ENERGY |
* | DD | PROCESSES AND PRODUCTS {7} |
192.1 | DF | .~ Coating, forming or etching by sputtering {3} |
192.12 | DF | .~.~ Glow discharge sputter deposition (e.g., cathode sputtering, etc.) {3} |
192.13 | .~.~.~ Measuring or testing (e.g., of operating parameters, property of article, etc.) |