US PATENT SUBCLASS 117 / 86
.~.~ With responsive control

Current as of: June, 1999
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117 /   HD   SINGLE-CRYSTAL, ORIENTED-CRYSTAL, AND EPITAXY GROWTH PROCESSES; NON-COATING APPARATUS THEREFOR

84  DF  FORMING FROM VAPOR OR GASEOUS STATE (E.G., VPE, SUBLIMATION) {8}
85  DF  .~ With a step of measuring, testing, or sensing {1}
86.~.~ With responsive control

DEFINITION

Classification: 117/86

With responsive control:

(under subclass 85) Subject matter further including a step of controlling a specified parameter or condition in response

to the measured, tested, or sensed condition or parameter.