US PATENT SUBCLASS 117 / 85
.~ With a step of measuring, testing, or sensing

Current as of: June, 1999
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117 /   HD   SINGLE-CRYSTAL, ORIENTED-CRYSTAL, AND EPITAXY GROWTH PROCESSES; NON-COATING APPARATUS THEREFOR

84  DF  FORMING FROM VAPOR OR GASEOUS STATE (E.G., VPE, SUBLIMATION) {8}
85.~ With a step of measuring, testing, or sensing {1}
86  DF  .~.~> With responsive control

DEFINITION

Classification: 117/85

With a step of measuring, testing, or sensing:

(under subclass 84) Subject matter which includes the measuring, testing, or sensing of a process condition or parameter during the process.

(1) Note. Since all processes must involve control of process parameters, placement here requires more than merely a statement of controlling or operating at a certain set of conditions. Thus, not included are mere recitations of "controlling" or "maintaining." Further, merely reciting a program or cycle or time control is not sufficient for placement here.

(2) Note. Equivalent terms include examining, inspecting, observing, viewing, and monitoring.