US PATENT SUBCLASS 117 / 104
.~.~ Using an organic precursor (e.g., propane, metal-organic, MOCVD, MOVPE)

Current as of: June, 1999
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117 /   HD   SINGLE-CRYSTAL, ORIENTED-CRYSTAL, AND EPITAXY GROWTH PROCESSES; NON-COATING APPARATUS THEREFOR

84  DF  FORMING FROM VAPOR OR GASEOUS STATE (E.G., VPE, SUBLIMATION) {8}
88  DF  .~ With decomposition of a precursor (except impurity or dopant precursor) composed of diverse atoms (e.g., CVD) {8}
104.~.~ Using an organic precursor (e.g., propane, metal-organic, MOCVD, MOVPE)

DEFINITION

Classification: 117/104

Using an organic precursor (e.g., propane, metal-organic, MOCVD, MOVPE):

(under subclass 88) Subject matter in which the product contains atoms derived from a precursor* which is an organic compound as defined in Class 532.