505 / | HD | SUPERCONDUCTOR TECHNOLOGY: APPARATUS, MATERIAL, PROCESS |
800 | DF | MATERIAL, PER SE, PROCESS OF MAKING SAME {4} |
815 | DF | .~ Process of making, per se {5} |
816 | .~.~ Sputtering, including coating, forming, or etching (Class 204/192.24) {1} | |
817 | DF | .~.~.~> Forming Josephson element |