US PATENT SUBCLASS 505 / 731
.~.~ Sputter coating

Current as of: June, 1999
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505 /   HD   SUPERCONDUCTOR TECHNOLOGY: APPARATUS, MATERIAL, PROCESS

725  DF  PROCESS OF MAKING OR TREATING HIGH Tc (ABOVE 30 K) SUPERCONDUCTING SHAPED MATERIAL, ARTICLE, OR DEVICE {11}
730  DF  .~ Vacuum treating or coating {2}
731.~.~ Sputter coating

DEFINITION

Classification: 505/731

Sputter coating:

(under subclass 730) Process in which ions from a plasma or

ion beam erode a target material under vacuum to deposit a coating or film (e.g., Magnetron, D.C., A.C., reactive sputtering) on a substrate.