US PATENT SUBCLASS 505 / 477
.~.~.~ Using plasma


Current as of: June, 1999
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505 /   HD   SUPERCONDUCTOR TECHNOLOGY: APPARATUS, MATERIAL, PROCESS

300  DF  PROCESSES OF PRODUCING OR TREATING HIGH TEMPERATURE (Tc GREATER THAN 30 K) SUPERCONDUCTOR MATERIAL OR SUPERCONDUCTOR CONTAINING PRODUCTS OR PRECURSORS THEREOF {24}
470  DF  .~ Coating {3}
473  DF  .~.~ Vapor deposition {3}
477.~.~.~ Using plasma


DEFINITION

Classification: 505/477

Using plasma:

(under subclass 473) Process wherein a gaseous vapor of ions in equilibrium or a vapor of ions in vacuum in nonequilibrium state referred to as a "cold plasma" is utilized while coating a substrate.