US PATENT SUBCLASS 438 / FOR 497
DIFFUSING LATERALLY AND ETCHING (437/986)
Current as of:
June, 1999
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
FOR 497
DIFFUSING LATERALLY AND ETCHING (437/986)
DEFINITION
Classification: 438/FOR.497
DIFFUSING LATERALLY AND ETCHING:
Foreign art collection involving carrying out a diffusion step in a lateral direction and etching.
