US PATENT SUBCLASS 438 / FOR 496
DIFFERENTIAL OXIDATION AND ETCHING (437/985)
Current as of:
June, 1999
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
FOR 496
DIFFERENTIAL OXIDATION AND ETCHING (437/985)
DEFINITION
Classification: 438/FOR.496
DIFFERENTIAL OXIDATION AND ETCHING:
Foreign art collection involving preferential oxidation accompanied by etching.