US PATENT SUBCLASS 438 / FOR 494
OXIDATION OF GATE OR GATE CONTACT LAYER (437/983)
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
FOR 494
OXIDATION OF GATE OR GATE CONTACT LAYER (437/983)
DEFINITION
Classification: 438/FOR.494
OXIDATION OF GATE OR GATE CONTACT LAYER:
Foreign art collection involving self-aligned masking by oxidation of either the gate or the gate contact layer.
