US PATENT SUBCLASS 438 / FOR 487
CONTROLLING LATTICE STRAIN (437/976)
Current as of:
June, 1999
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
FOR 487
CONTROLLING LATTICE STRAIN (437/976)
DEFINITION
Classification: 438/FOR.487
CONTROLLING LATTICE STRAIN:
Foreign art collection involving regulating of strain in the lattice.