US PATENT SUBCLASS 438 / FOR 482
FLUID GROWTH DOPING CONTROL (437/971)
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
FOR 482
FLUID GROWTH DOPING CONTROL (437/971)
DEFINITION
Classification: 438/FOR.482
FLUID GROWTH DOPING CONTROL:
Foreign art collection involving regulation of the doping process during fluid deposition.
