US PATENT SUBCLASS 438 / FOR 461
SHALLOW DIFFUSION (437/950)
Current as of:
June, 1999
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
FOR 461
SHALLOW DIFFUSION (437/950)
DEFINITION
Classification: 438/FOR.461
SHALLOW DIFFUSION:
Foreign art collection involving formation of regions of very
small depth in the surface of the substrate.