US PATENT SUBCLASS 438 / FOR 460
CONTROLLED ATMOSPHERE (437/949)

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

FOR 460CONTROLLED ATMOSPHERE (437/949)

DEFINITION

Classification: 438/FOR.460

CONTROLLED ATMOSPHERE:

Foreign art collection involving use of a regulated gaseous environment, e.g., inert gases, specifically proportioned mixtures, etc.