US PATENT SUBCLASS 438 / FOR 457
SUBSTRATE SURFACE PREPARATION (437/946)
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
FOR 457
SUBSTRATE SURFACE PREPARATION (437/946)
DEFINITION
Classification: 438/FOR.457
SUBSTRATE SURFACE PREPARATION:
Foreign art collection involving steps for treating the surface of a substrate prior to deposition of a layer or junction formation.