US PATENT SUBCLASS 438 / FOR 454
THERMALLY ASSISTED BEAM PROCESSING (437/943)
Current as of:
June, 1999
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
FOR 454
THERMALLY ASSISTED BEAM PROCESSING (437/943)
DEFINITION
Classification: 438/FOR.454
THERMALLY ASSISTED BEAM PROCESSING:
Foreign art collection involving use of heat other than that provided by (or in addition to) a beam.
