US PATENT SUBCLASS 438 / FOR 450
DEFECT CONTROL OF SEMICONDUCTOR WAFER (PRETREATMENT) (437/939)
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
FOR 450
DEFECT CONTROL OF SEMICONDUCTOR WAFER (PRETREATMENT) (437/939)
DEFINITION
Classification: 438/FOR.450
DEFECT CONTROL OF SEMICONDUCTOR WAFER (PRETREATMENT):
Foreign art collection involving steps, involving pretreating ones, for the control of defects in a semiconductor wafer.
