US PATENT SUBCLASS 438 / FOR 448
HYDROGEN PLASMA TREATMENT OF SEMICONDUCTOR DEVICE (437/937)
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
FOR 448
HYDROGEN PLASMA TREATMENT OF SEMICONDUCTOR DEVICE (437/937)
DEFINITION
Classification: 438/FOR.448
HYDROGEN PLASMA TREATMENT OF SEMICONDUCTOR DEVICE:
Foreign art collection involving use of hydrogen plasma to treat the semiconductor device.
